February 12, 2014 - Servomex announces SERVOPRO NanoChrome for ultra-trace purity measurements for UHP gases. Designed for the measurement of contaminant gases and hydrocarbons that can be present at ultra-trace levels in semiconductor manufacture, the NanoChrome makes sub-ppb measurements for H2, CH4, CO, CO2 and NMHC in a range of common background gases including He, H2, N2, Ar and O2. The NanoChrome delivers low detection limits through a high-sensitivity Plasma Emission Detector (PED) specially developed by Servomex. Already field proven through ultra-trace measurements of argon and nitrogen, the extended measurement wavelength enables the enhanced PED to include measurements for H2, CH4, CO and CO2, as well as a direct hydrocarbon measurement with no need for a methanizer.
As there is no requirement for a flammable fuel gas, the Servomex PED sensor also enhances safety and lowers operational costs. The analytical sensitivity and reliability of the NanoChrome is enhanced by advanced signal recovery, utilizing specially developed adaptive chromatographic filtering methods and ProPeak peak detection techniques for a more sensitive and selective measurement than previously available for UHP gases. By utilizing a Direct Analysis Methodology, the NanoChrome removes the doubt associated with measurements made by FID and RGD measurements with the certainty of exceptional measurement accuracy.
Integrated alongside the Servomex DF-500 ultra-trace analyzer series and DF-700 moisture analyzer series, Servomex now offers the semiconductor industry a single, complete solution for reliable UHP gas analysis.
